Silicon|Ring

Silicon

Ring

ProductSiliconRing

Silicon Ring
Description
  • The silicon ring mounted around wafer on ESC serves to maintain a uniform plasma density and etching rate
Applications
  • Dry etcher process
  • Focus Ring
  • Insert Ring
  • Collar Ring
  • Shield Ring
  • Hot Edge Ring
  • Protection Ring
  • Etc
Specification
Properties Value
Material Single Crystal Silicon
Multi Crystal Silicon
Out diameter 500mm ~ 240mm
Resistivity(Ω.㎝) Low Res. (< 0.02)
Middle Res. (1~4)
RRG(%) < 5%
Surface condition Polishing, Lapping, Grinding
Surface Flatness < 5㎛
Machining precision < 10㎛
Quality Chipping, Scratch, Crack free
Contamination, Stain free