Silicon|Electrode

Silicon

Electrode

ProductSiliconElectrode

Silicon Electrode
Description
  • The Plasma gas flowing through the micro holes of silicon plate to etch the wafer
Applications
  • Dry etcher process
Specification
Properties Value
Material Single Crystal Silicon
Out diameter 500mm ~ 240mm
Resistivity(Ω.㎝) Low Res. (<0.02)
Middle Res. (1~4)
High Res. (60~90)
RRG < 5%
Gas hole Diameter 0.7~0.3mm
Roundness < 0.05mm
Concentricity < 0.05mm
Δ XY-Position < 0.05mm
Surface condition Polishing, Lapping, Grinding
Surface Flatness < 5㎛
Machining precision < 10㎛
Quality Chipping, Scratch, Crack free
Contamination, Stain free