Silicon Carbide|CVD-SiC Bulk

Silicon Carbide

CVD-SiC

ProductSilicon CarbideCVD-SiC

CVD-SiC Bulk
Description
  • CVC or CVD bulk selective
  • High corrosion resistance
  • Resistivity control
Applications
  • Dry etcher for semiconductor process
Specification
Properties Value
Density (g/cm³) 3.21
Flexural strength (MPa) 500
Vickers hardness (Hv) 2,400
Thermal conductivity (W/mK) 170
Resistivity (Ω-cm) 0.1~1000