Silicon Carbide|SiC Coating

Silicon Carbide

Coating

ProductSilicon CarbideCoating

SiC Coating
Description
  • Substrate : graphite
  • High thermal purification
  • CVD coating
  • CVR+CVD coating
Applications
  • LED MOCVD Susceptor - 2, 4, 6” available
  • H/Z parts for CZ growing
Specification
Properties Value
Purity (%) ≥ 99.9999
Density (g/cm3) 3.20
shore hardness 52
Thermal Expansion coefficient (10-6/K) 4.5
Thermal Conductivity (W/mK) 214
Coating Thickness (um) 20-250 ± 10%