Fine Ceramics|AIN

Fine Ceramics

Fine Ceramics

AIN

ProductFine CeramicsAIN

Aluminum Nitride
Description
  • AlN is non-oxide ceramic, has high thermal conductivity similar to metal.
  • Insulator, Low CTE (coefficient of thermal expansion), high corrosion resistance
Applications
  • Dry etcher and CVD for semiconductor process
  • LED substrate & heat sink
Specification
Properties Value
Density (g/cm³) 3.3
Flexural strength (MPa) 310
Vickers hardness (GPa) 10.4
Thermal Conductivity (W/mK, @20℃) 170
Dielectric Strength (V/m) 14 X 106