Description |
- AlN is non-oxide ceramic, has high thermal conductivity similar to metal.
-
Insulator, Low CTE (coefficient of thermal expansion), high corrosion resistance
|
Applications |
-
Dry etcher and CVD for semiconductor process
- LED substrate & heat sink
|
Specification |
Properties |
Value |
Density (g/cm³) |
3.3
|
Flexural strength (MPa) |
310 |
Vickers hardness (GPa) |
10.4
|
Thermal Conductivity (W/mK, @20℃) |
170 |
Dielectric Strength (V/m) |
14 X 106 |
|