제품정보|Specialty Gases

Specialty Gases

Specialty Gases
Gas Name Purite Cylinder Size
NO 4N(99.99%) 47L
4N5(99.995%) 440L
HBr 5N (99.999%) 47L
5N5 (99.9995%)
SiH4 6N (99.9999%) 47L,440L
CF4 5N (99.999%) 47L
N2 N2 47L
H2 6N (99.9999%) 47L
He 6N (99.9999%) 47L
Gas Name Purity Cylinder Size Valve
11BF3 99.995% 0.44L CGA330
AsH3 99.9999% 44L DISS632
BCl3 99.999% 10L CGA660
47L DISS660
11BF3 99.995% 0.44L CGA330
BF3 99.5% 47L CGA330
99.995% 44L
CF4 99.999% 47L CGA580
99.999% 47L JIS22R
C2F6 99.999% 47L JIS22R
C2H4 100.00% 47L DISS724
C2HF5 99.99% 47L DISS716
C3H6 99.97% 47L DISS724
C4F6 99.95% 10L JIS22L
CH2F2 99.99% 47L JIS22L
JIS22R
CH4 99.999% 47L CGA580
CHF3 99.999% 47L JIS22R
Cl2 99.999% 10L CGA660
47L
CO 99.997% 47.5L CGA350
GeH4 99.999% 8L CGA350
G2H4 99.999% 16L CGA350
HCl 99.999% 49L CGA330
Kr 99.999% 50L CGA580
Ne 99.999% 49L CGA580
NF3 99.99% 440L DISS640
47L DISS640
Si2H6 99.998% 49L DISS632
SiCl4 99.99% 47L CGA350
SiH2Cl2 (DCS) 99.8% 50L CGA678
SiHCl3(TCS) 99.95% 212L 1/4 VCR
WF6 99.999% 10L JIS22R
Xe 99.9999% 10L CGA580