Gas Name | Purity | Cylinder Size | Valve Type |
---|---|---|---|
NO | 3N | 47L | JIS22R |
3N5 | |||
4N | |||
CF4 | 5N | 47L, 440L | DISS716, JIS22R |
HBr | 5N | 15.74L, 47L | JIS22L, CGA330 |
5N5 | |||
SiH4 | 6N | 47L, 440L | DISS632, JIS22L |
Si2H6 | 4N8 | 47L | JIS22L |
He | 5N | 47L | JIS22R |
6N | |||
N2 | 6N | 47L | JIS22R |
H2 | 6N | 47L | JIS22L |
Ar | 6N | 47L | JIS22R |
AsH3 | 6N | 44L | DISS632 |
BCl3 | 5N | 47L | CGA660 |
BF3 | 3N5 | 47L | CGA330 |
C2F6 | 5N | 47L | JIS22R |
C2H4 | 3N5 | 47L | CGA510 |
C4F8 | 4N | 49L | CGA660 |
CHF3 | 5N | 47L | JIS22R |
CO2 | 5N | 47L, 440L | JIS22R, DISS716 |
GeH4 | 5N | 44L | DISS632 |
HCl | 5N | 47L | CGA330 |
Kr | 5N | 50L | CGA580 |
Ne | 5N | 49L | CGA580 |
NF3 | 4N | 47L | DISS640 |
SiH2Cl2 (DCS) | 3N | 40L | CGA678 |
SiHCl3 (TCS) | 4N | 210L | 1/2" VCR Diaphragm |
WF6 | 5N5 | 10L | CGA638 |
Xe | 6N | 50L | CGA580 |