Silicon|Other Parts

Silicon

Other Parts

제품정보SiliconOther Parts

하나 머티리얼즈의 실리콘 제품을 소개합니다.

기술과 미래가 성장하는 하나 머티리얼즈
실리콘 분야의 고객가치 경영을 추구해나가겠습니다.
Silicon Other Parts
Description
Product Description
Silicon Boat To deposit thin film on wafer during the processes of LPCVD / Deffusion
Silicon Pedestal As the base of silicon boat, it blocks the heat & light to maintain constant temperature
Silicon Tube Device for providing a raw materials in the melting furnace
450mm Single Silicon Wafer 450mm silicon mechanical wafer
Applications
Silicon Boat / Silicon Pedestal Silicon Tube 450mm Single Silicon Wafer
LPCVD / Diffusion for semiconductor process Growing for semiconductor and Solar Wafer Semiconductor IC (Integrated Circuit) Chip
Specification
Properties Silicon Boat / Pedestal
Material Single crystal silicon
Wafer Charging 117EA
Deposition Uniformity < 2%
Machining Precision < 10㎛
Properties 450mm Single Silicon Wafer
Material Single crystal silicon
Type P Type (Boron dipant)
Resistivity (Ω.㎝) Middle Res. (1~4)
Our Diameter 450mm
Thickness 0.925mm
Surface Condition Front - Polishing
Back - Polishing
Notch Dimension Depth - 1mm
Angle - 90°
Roughness Ra < 0.02㎛
Total Thickness Variation (TTV) < 10㎛
Properties Silicon Tube
Material Single crystal silicon
Total Length 1,683mm ~ 1,523mm
Surface Condition Grinding
Machining Precision < 10㎛